Laser ultralabur baten bidezko urrezko estaldura meheen ablazioa

Abstract

Fluentzia-ataria garrantzi handiko parametroa da laser bidezko ablazio prozesuetan. Izan ere, honen determinazioaezinbestekoa da egitura nanometrikoen fabrikazioa optimizatzeko. Lan honetan, laser ultralabur baten bidez pultsukopuru desberdinak irradiatuz 300 nm-ko lodiera duen urrezko geruza mehe baten fluentzia-ataria aztertu da.Era berean, materialaren ezaugarri den inkubazio-faktorea lortu da, laserraren erradioaren estimazioa egitearekinbatera. Bestalde, geruzaren dimentsioak fluentzia-atarian duen eragina aztertu da, fluentzia-atariak lodierarekikoduen joera behatuz.Azkenik, kromoz eta urrez osaturiko geruza bikoitza ikertu eta aldez aurretik urrezkogeruzaren kasuan lortutako emaitzekin erkatu da.Fluence threshold is an important parameter in laser ablation processes. In fact, its determination is essential tooptimize the fabrication of submicrometric structures in materials. In this work, the fluence threshold of a 300-nmgold thin film was studied by applying different number of pulses through ultrafast laser irradiation. In addition,the incubation factor characteristic of the material was obtained and an estimation of the spot radius was made.Moreover, the effect of layer thickness on the fluence threshold has been analized. Finally, double layers compo-sed by chromium and gold layers were studied and compared with the previously obtained results for the gold film.